Strong cube-textured titanium nitride conductive films directly on flexible metal substrate

THIN SOLID FILMS

卷:734

Article

Gao, Ying^1,2,3  Sun, Sicong^1,2,3  Li, Yongkuan^1,2,3  Selvamanickam, Venkat^1,2,3 

[1] Univ Houston, Dept Mech Engn, Houston, TX 77204 USA

[2] Univ Houston, Adv Mfg Inst, Houston, TX 77204 USA

[3] Univ Houston, Texas Ctr Superconduct, Houston, TX 77204 USA

关键词: Titanium nitride;    Ion beam assisted deposition;    Biaxially textured;    Epitaxial growth;    Roll-to-roll deposition process;    Conductive buffer;   

DOI  :  10.1016/j.tsf.2021.138848

来源: Elsevier

【 摘 要 】

Single crystal-like titanium nitride (TiN) by ion beam assisted deposition (IBAD) method is a potential conductive and thermally-stable template for growing highly-oriented REBa2Cu3O7-x (RE = rare earth) superconductor tapes as well as optoelectronics on flexible metal substrates. Previously, amorphous seed layers such as Al2O3 and Y2O3 were necessary for the biaxially-textured film growth by IBAD. Such nonconductive seed layers prevent an electrically-conductive path between functional film and bottom metal substrate such as flexible, electropolished Hastelloy (EPH). An approach of Argon ion (Ar+) pre-treatment of EPH surface, followed by roll-to-roll IBAD process has been developed for a simplified architecture of cube-textured TiN directly on flexible metal substrate. Strong cube-textured TiN films with out-of-plane texture spread of 1.8 degrees and in-plane texture spread of 5.6 degrees were obtained by IBAD technique on flexible Hastelloy substrate without any intervening layers; this provides a conductive template for functional layers. Also, the ion pretreatment step is easily achieved in an IBAD system which simplifies the fabrication process.

【 授权许可】

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