The Improvement of Utilization Ratio of Metal Organic Sources for the Low Cost Preparation of MOCVD-synthesized YBCO Films based on a Self-heating Technology

5th Annual International Conference on Material Science and Engineering

Zhao, Ruipeng^1 ; Liu, Qing^1 ; Xia, Yudong^2 ; Tao, Bowan^1 ; Li, Yanrong^1

State Key Lab of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu

610054, China^1

School of Physical Science and Technology, Southwest Jiaotong University, Chengdu

610031, China^2

关键词: A3. metal organic chemical vapor deposition (MOCVD);    Biaxially textured;    Conventional heating;    Lower-power consumption;    Radiation heating;    Smooth surface;    Structure and performance;    Utilization ratios;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/275/1/012005/pdf
DOI  :  10.1088/1757-899X/275/1/012005

来源: IOP

【 摘 要 】

We have successfully applied metal organic chemical vapor deposition (MOCVD) to synthesize biaxially textured YBa2Cu3O7-δ(YBCO) superconducting films on the templates of LaMnO3/epitaxial MgO/IBAD-MgO/solution deposition planarization (SDP) Y2O3/Hastelloy tape. The YBCO films have obtained dense and smooth surface with good structure and performance. A new self-heating method, which replaced the conventional heating-wire radiation heating method, has been used to heat the Hastelloy metal tapes by us. Compared with the heating-wire radiation heating method, the self-heating method shows higher energy efficiency and lower power consumption, which has good advantage to simplify the structure of the MOCVD system. Meanwhile, the utilization ratio of metal organic sources can be increased from 6% to 20% through adopting the new self-heating method. Then the preparation cost of the YBCO films can be also greatly reduced.