WET-ETCH FIGURING Optical by Controlled Application of Liquid Etchant.

Britten, J.

Technical Information Center Oak Ridge Tennessee

关键词: Chemical etching;    Etchants;    Optics;    Wet etching;    Polishing;   

RP-ID  :  DE200515013516

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

WET-ETCH FIGURING (WEF) is an automated method of precisely figuring optical materials by the controlled application of aqueous etchant solution. This technology uses surface-tension-gradient-driven flow to confine and stabilize a wetted zone of an etchant solution or other aqueous processing fluid on the surface of an object. This wetted zone can be translated on the surface in a computer-controlled fashion for precise spatial control of the surface reactions occurring (e.g. chemical etching). WEF is particularly suitable for figuring very thin optical materials because it applies no thermal or mechanical stress to the material. Also, because the process is stress-free the workpiece can be monitored during figuring using interferometric metrology, and the measurements obtained can be used to control the figuring process in real-time - something that cannot be done with traditional figuring methods.