Etching technology in formation of self-organized aluminum mesh for sensor and display applications

7th International Conferences on Physics and Technology of Nanoheterostructure Microwave Electronics: Mokerov Readings 2016;8th International Conferences on Physics and Technology of Nanoheterostructure Microwave Electronics: Mokerov Readings 2017

Zhylinski, V.^1 ; Bagamazava, N.^1 ; Bezborodov, V.^1 ; Smirnov, A.^2 ; Chernik, A.^1 ; Zharski, I.^1

Belarusian State Technological University, Sverdlova Str. 13a, Minsk

220006, Belarus^1

Belarusian State University of Informatics and Radioelectronics, P. Brovki Str. 6, 220013, Belarus^2

关键词: Chemical etching;    Display application;    Indium Tin Oxide films;    Nanoporous alumina;    Oxalic acid solution;    Porous alumina;    Pyramidal morphologies;    Thin film-sputtered;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/475/1/012030/pdf
DOI  :  10.1088/1757-899X/475/1/012030

来源: IOP

【 摘 要 】

The paper describes the investigations the temperature and concentration influence on etching of nanoporous alumina in technology of production of self-organized aluminum mesh for sensor and display applications. The pyramidal aluminum meshes was obtained by anodizing of thin film sputtered on sodium glass in oxalic acid solution at voltage of 50 V and then chemical etching of porous alumina in the mixture of phosphoric and chromic acid. It has been shown that the pyramidal morphology of Al meshes can be prepared by chemical etching at temperature of 60°C. This pyramidal morphology of Al mesh can provide good alignment properties and can be one of the promising solutions for production of sensory microsystems and displays without indium-tin oxide films.