A review of piezoelectric MEMS sensors and actuators for gas detection application

Nanoscale Research Letters

Review

Mohammed O. Ba Sabbea¹  Usman Isyaku Bature²  Mohamad Radzi Ahmad²  Mehwish Hanif²  Sami Sultan Alabsi²  Saeed S. Ba Hashwan²  Furqan Zahoor²  Mohd Haris Md. Khir²  Illani Mohd Nawi²  Abdullah Saleh Algamili²  Muhammad Junaid³  Y. Al-Douri⁴ 

[1] Department of Electrical and Computer Engineering, University of Waterloo, N2L 3G1, Waterloo, ON, Canada;Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia;Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia;Department of Electronic Engineering, Balochistan University of Information Technology, Engineering and Management Sciences, 87300, Quetta, Pakistan;Nanotechnology and Catalysis Research Centre (NANOCAT), University of Malaya, Kuala Lumpur, Malaysia;Department of Mechanical Engineering, Faculty of Engineering, Piri Reis University, Eflatun Sk. No: 8, 34940, Tuzla, Istanbul, Turkey;Department of Applied Science and Astronomy, College of Sciences, University of Sharjah, Sharjah, United Arab Emirates;

关键词: Microelectromechanical system (MEMS);    Gas sensors;    Piezoelectric actuators;    Sensing principle;    Microcantilever;    QCM;    SAW;    BAW;    PMUT;    FBAR;    Sensing layers;   

DOI  :  10.1186/s11671-023-03779-8

 received in 2022-11-17, accepted in 2023-01-25,  发布年份 2023

来源: Springer

【 摘 要 】

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

【 授权许可】

CC BY   
© The Author(s) 2023

【 图 表 】

Fig. 2

Fig. 1

Fig. 1

Fig. 4

Fig. 7

Fig. 1

Fig. 2

Fig. 6

Fig. 1

Fig. 1

Fig. 5

Fig. 3

Fig. 5

Fig. 3

Fig. 2

Fig. 3

12888_2023_4583_Article_IEq4.gif

12888_2023_4583_Article_IEq3.gif

12888_2023_4583_Article_IEq2.gif

12888_2023_4583_Article_IEq1.gif

Fig. 3

Fig. 4

Fig. 2

Fig. 3

12974_2023_2714_Article_IEq5.gif

Fig. 2

Fig. 1

Fig. 1

Fig. 5

Fig. 1

Fig. 3

Fig. 6

40798_2023_559_Article_IEq1.gif

Fig. 6

Fig. 3

Fig. 5

Fig. 8

Fig. 2

Fig. 2

Fig. 2

Fig. 4

Fig. 1

Fig. 1

Fig. 1

Fig. 8

Fig. 5

Fig. 4

Fig. 2

Fig. 3

12302_2023_718_Article_IEq4.gif

Fig. 2

Fig. 3

Fig. 5

Fig. 5

Fig. 7

Fig. 6

Fig. 4

Fig. 3

Fig. 2

Fig. 1

Fig. 5

Fig. 6

Fig. 3

Fig. 2

Fig. 5

Fig. 2

Fig. 4

40517_2023_248_Article_IEq17.gif

40517_2023_248_Article_IEq16.gif

40517_2023_248_Article_IEq15.gif

40517_2023_248_Article_IEq14.gif

40517_2023_248_Article_IEq13.gif

40517_2023_248_Article_IEq12.gif

40517_2023_248_Article_IEq11.gif

40517_2023_248_Article_IEq10.gif

40517_2023_248_Article_IEq9.gif

40517_2023_248_Article_IEq8.gif

40517_2023_248_Article_IEq7.gif

40517_2023_248_Article_IEq6.gif

40517_2023_248_Article_IEq5.gif

40517_2023_248_Article_IEq4.gif

40517_2023_248_Article_IEq3.gif

40517_2023_248_Article_IEq2.gif

40517_2023_248_Article_IEq1.gif

Fig. 9

Fig. 1

Fig. 13

Fig. 12

12936_2023_4464_Article_IEq13.gif

Fig. 2

Fig. 5

Fig. 11

Fig. 1

Fig. 10

40854_2023_460_Article_IEq15.gif

12936_2023_4464_Article_IEq7.gif

Fig. 9

Fig.1

Fig. 1

Fig. 2

Fig. 3

Fig. 5

13690_2023_1046_Article_IEq7.gif

13690_2023_1046_Article_IEq6.gif

Fig. 3

13690_2023_1046_Article_IEq4.gif

Fig. 7

Fig. 2

Fig. 1

Fig. 6

Fig. 1

Fig. 1

12936_2023_4470_Article_IEq1.gif

Fig. 5

Fig. 6

Fig. 1

Fig. 5

Fig. 2

Fig. 6

Fig. 4

Fig. 9

Fig. 3

Fig. 3

Fig. 6

Fig. 2

Fig. 1

Fig. 3

Fig. 2

Fig. 6

Fig. 4

Fig. 2

Fig. 1

Fig. 1

Fig. 1

Fig. 6

Fig. 5

Fig. 4

Fig. 2

Fig. 3

Fig. 4

Fig. 2

Fig. 2

Fig. 1

12302_2023_718_Article_IEq52.gif

Fig. 1

Fig. 2

12888_2023_4583_Article_IEq2.gif