Analysis of the bending stiffness and adhesion effect in RF-MEMS structures

13th International Conference on Tribology

Birleanu, C.^1 ; Pustan, M.^1 ; Dudescu, C.^2 ; Merie, V.^3 ; Pintea, I.^1

Mechanical Systems Engineering Department, Technical University of Cluj-Napoca, Blv. Muncii no. 103-105, Cluj-Napoca

400641, Romania^1

Mechanical Engineering Department, Technical University of Cluj-Napoca, Blv. Muncii no. 103-105, Cluj-Napoca

400641, Romania^2

Materials Science and Engineering Department, Technical University of Cluj-Napoca, Blv. Muncii no. 103-105, Cluj-Napoca

400641, Romania^3

关键词: Electroplated gold;    Free-standing structures;    Geometrical dimensions;    Good correlations;    Microelectromechanical system (MEMS);    Micro-cantilevers;    Noise and vibration;    Tribological behaviors;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/174/1/012029/pdf
DOI  :  10.1088/1757-899X/174/1/012029

来源: IOP

【 摘 要 】

Microelectromechanical system (MEMS) is a special branch with a wide range of applications in sensing, switching and actuating devices. Designing the reliable MEMS for thin free-standing structures like as bridges and cantilevers requires understanding of the tribomechanical properties of the materials and structures. The effect of geometrical dimensions (cross-section dimensions and length) on mechanical and tribological behavior of free-standing MEMS structures made of electroplated gold was analyzed in this paper. Special attention was given to the dependences between stiffness and cantilever length and the dependences between bending stress and variable travel range of actuated load. The force position was moved from the beams free-end toward to the anchor. The tests were performed at room temperature (22°C) and relative humidity RH of 40% with a noise- and vibration-isolated and environment-controlled XE-70 AFM from Park Systems using the contact mode. Each measurement was repeated many times in order to improve the accuracy of the experimental results. The stiffness of a microcantilever varies if the position of the acting force is changed. The experimental results obtained were in good correlation with those obtained analytically.