Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide

SURFACE & COATINGS TECHNOLOGY

卷:350

Article; Proceedings Paper

Tang, Haochun^1,2  Hashigata, Ken^1,2  Chang, Tso-Fu Mark^1,2  Chen, Chun-Yi^1,2  Nagoshi, Takashi³  Yamane, Daisuke^1,2  Konishi, Toshifumi^1,2,4  Machida, Katsuyuki^1,2  Masu, Kazuya^1,2  Sone, Masato^1,2 

[1] Tokyo Inst Technol, Inst Innovat Res, Midori Ku, 4259 Nagatsuta Cho, Yokohama, Kanagawa 2268503, Japan

[2] Japan Sci & Technol Agcy, CREST, Midori Ku, 4259 Nagatsuta Cho, Yokohama, Kanagawa 2268503, Japan

[3] Natl Inst Adv Ind Sci & Technol, 1-2-1 Namiki, Tsukuba, Ibaraki 3058564, Japan

[4] NTT Adv Technol Corp, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430124, Japan

关键词: Electroplated gold;    Dense carbon dioxide;    Micro-compression;    Size effect;   

DOI  :  10.1016/j.surfcoat.2018.02.041

来源: Elsevier

【 摘 要 】

Micro-mechanical properties of gold electroplated with dense carbon dioxide contained electrolyte (EP-DCE) were investigated by micro-compression tests using micro-pillar specimens for applications as movable components in MEMS devices. The effect of grain size on the micro-mechanical properties was also investigated using a gold film fabricated by conventional electroplating (CONV-EP). The gold film fabricated by the EP-DCE showed a finer average grain size when compared with that of the CONV-EP. Because of the finer grain size, the micro pillar fabricated from the EP-DCE film showed a higher strength than that of the micro-pillar fabricated from the CONV-EP. An increase in the compressive flow stress from 740 to 810 MPa was observed as dimensions of the micro-pillars decreased from 20 x 20 x 40 to 10 x 10 x 20 mu m(3), which was a result of the sample size effect.

【 授权许可】

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