A Versatile Technology Based on Deep Reactive Ion Etching and Anodic Bonding for the Applicationof Micromixers and Microfilters

Sensors & Transducers

Maria J. LOPEZ-MARTINEZ¹  Jose A. PLAZA¹  Mohamed AGOUZOUL²  Mourad TAHA JANAN³  Michael LEE⁴  Abdelhamid ERRACHID⁴  Nicole JAFFREZIC-RENAULT⁴  Nadia ZINE⁴  Safae MERZOUK⁴  Chiraz JAAFAR MAALEJ⁵  Abdelhamid ELAISSARI⁵ 

[1] Instituto de Microelectronica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193, Bellaterra, Barcelona, Spain ;Université Mohamed V Agdal, Ecole Mohammadia d’Ingénieurs, ERD3M, avenue Ibn Sina, BP 765, Rabat, Morocco ;Université Mohamed V Souissi, Ecole Normale Supérieure de l'Enseignement Technique, 10100 Rabat Morocco;Université de Lyon, Institute des Sciences Analytiques (ISA) UMR 5280, 5 rue de la Doua Villeurbanne Cedex, 69100, France ;Université de Lyon, Laboratoire d'Automatique et de Génie des Procédés (LAGEP) – UMR 5007, 43 boulevard du 11 novembre 1918, 69622, Villeurbanne, France ;

关键词: Deep Reactive Ion Etching;    Anodic Bonding;    Silicon;    Micromixer;    Microfilter.;   

DOI  :  

来源: DOAJ

【 摘 要 】

A technology for the fabrication of silicon micromixers and microfilters is presented with their applications being analyzed. The versatility of this technology is observed with the use of two different photolithographic masks where active microfluidic components have been developed. The silicon micromixers and microfilters were developed and manufactured by photolithography (PL) and deep-reactive ion etching (DRIE) and then bonded onto sand-blasted glass wafers by anodic bonding. The fluidic flow within the specialized microchannel was observed under an optical microscope with micromixing using two differently colored dyes and the microfiltration of poly (D, L lactic-co-glycolic acid) microparticles (MP-PLGA) for size-sorting and separation Finally, the microfiltering device was injected with a whole blood sample for the separation of larger leukocyte cells.

【 授权许可】

Unknown