A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing

Sensors

Luca De Stefano²  Krzysztof Malecki²  Francesco G. Della Corte¹  Luigi Moretti¹  Ilaria Rea²  Lucia Rotiroti² 

[1] DIMET “Mediterranea” University of Reggio Calabria, Località Feo di Vito, 89060 Reggio Calabria, Italy;Institute for Microelectronics and Microsystems, National Council of Research, Via P. Castellino 111, 80131 Naples, Italy (E-mail for Ilaria Rea:

关键词: Porous Silicon;    Anodic Bonding;    Microchamber;    Lab-on-Chip;   

DOI  :  10.3390/s6060680

来源: mdpi

【 摘 要 】

We have recently presented an integrated silicon-glass opto-chemical sensor for lab-on-chip applications, based on porous silicon and anodic bonding technologies. In this work, we have optically characterized the sensor response on exposure to vapors of several organic compounds by means of reflectivity measurements. The interaction between the porous silicon, which acts as transducer layer, and the organic vapors fluxed into the glass sealed microchamber, is preserved by the fabrication process, resulting in optical path increase, due to the capillary condensation of the vapors into the pores. Using the Bruggemann theory, we have calculated the filled pores volume for each substance. The sensor dynamic has been described by time-resolved measurements: due to the analysis chamber miniaturization, the response time is only of 2 s. All these results have been compared with data acquired on the same PSi structure before the anodic bonding process.

【 授权许可】

Unknown   
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