Dicing-free SOI process based on wet release technology

Micro & nano letters

article

Yongcun Hao¹  Jianbing Xie¹  Weizheng Yuan¹  Honglong Chang¹ 

[1] Ministry of Education Key Laboratory of Micro/Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University

关键词: silicon;    silicon compounds;    elemental semiconductors;    stiction;    sputter etching;    silicon-on-insulator;    wet release technology;    dicing-free silicon-on-insulator process;    microelectromechanical system devices;    stiction;    dicing damage;    handle layer;    hydrofluoric acid solution;    deep reactive ion etching;    structure layer;    notching effect;    layout design rules;    front side pattern;    backside pattern;    grooved carrier wafer;    yield rate;    tuning fork gyroscope;    Si−SiO2;   

DOI  :  10.1049/mnl.2016.0342

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Objective: Arterial oxygen pressure (PaO2) may decrease at induced hypotension during general anesthesia by nicardipine or prostaglandin E1 (PG). The present study was performed to compare the effects of nicardipine and PG on PaO2 during induced hypotension in general anesthesia.Methodology: This randomized controlled non-blind study was conducted at our operating room at the University Hospital. Fifty patients aged 40 to 65 years for resection of brain tumor were enrolled in the study. During general anesthesia with isoflurane, nitrous oxide and fentanyl, when hemodynamics were stable, PG 0.05 µg/kg/min, or 0.1 µg/kg/min, or nicardipine 0.5 µg/kg/min, or 1.0 µg/kg/min was administered for two hours in 10 patients each. Another 10 patients were reserved as the control. Arterial blood pressure, heart rate, percutaneous oxygen saturation (SpO2), end-tidal carbon dioxide pressure (EtCO2), and arterial oxygen (PaO2) and carbon dioxide (PaCO2) pressures were measured until 90 min after stop of administration of PG or nicardipine. Ratio of PaO2 and oxygen fraction (P/F ratio) was calculated.Results: Both PG and nicardipine decreased blood pressure similarly with increase in heart rate. P/F ratio decreased only with PG.Conclusion. The use of prostaglandin E1 to induce hypotension during general anesthesia is associated with a decreased PaO2, while nicardipine has no effect. This difference in effect on PaO2 is important in selecting an agent to induce hypotension in neurosurgery.

【 授权许可】

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