SiC/Si heterojunction VDMOS breaking silicon limit by breakdown point transfer technology

Micro & nano letters

article

Baoxing Duan¹  Jianmei Lv¹  Yihan Zhao¹  Yintang Yang¹ 

[1] Key Laboratory of the Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University

关键词: silicon compounds;    wide band gap semiconductors;    silicon;    elemental semiconductors;    MOSFET;    semiconductor device breakdown;    semiconductor heterojunctions;    H-SiC;    SiC-Si;    voltage 226 V;    voltage 578 V;    electric field;    drift region length;    terminal technology;    source electrode;    soft silicon material;    specific on-resistance;    breakdown voltage;    P-base drift region;    N-drift region;    innovative semiconductor power vertical double-diffused MOSFET;    breakdown point transfer technology;    heterojunction VDMOS breaking silicon limit;   

DOI  :  10.1049/mnl.2017.0444

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Background:  Many suspected laryngopharyngeal neoplasms are examination under general anaesthesia (EUA). Office-based endoscopy is already routinely performed on all patients presenting with a suspected laryngopharyngeal neoplasm. Accurate clinical staging and tissue sampling using flexible endoscopy may eliminate the need for EUA. Aim:  To compare the use of flexible endoscopy to EUA as primary diagnostic tool of laryngopharyngeal lesions to EUA, using accuracy of tissue samples obtained and clinical staging as primary outcome measures. Duration, patient tolerance and cost implications were also assessed. Setting:  The study was performed in the outpatient department and surgical theatres of Tygerberg Hospital, Cape Town, South Africa. Methods:  A prospective study compared staging and tissue sampling accuracy with flexible endoscopy to EUA in 54 patients. Duration, tolerance and cost implications were also assessed. Results:  Flexible endoscopic biopsy had a 77.1% sensitivity, 100% specificity and 82.2% diagnostic accuracy. Liquid-based cytology had 97.3% sensitivity, 100% specificity and 97.9% diagnostic accuracy in differentiating high-grade lesions from low-grade lesions. Local staging agreement occurred in 88.6% ( n  = 31/35) of malignant cases. The mean duration was 15 ± 7 min; 86% of patients perceived the procedure as tolerable. Flexible endoscopy as a primary diagnostic tool would have avoided EUA in 68.6% ( n  = 24/35) of squamous cell carcinoma cases, with a R128 232 cost savings. Conclusion:  Office-based endoscopy is an accurate, well-tolerated, time- and cost-effective primary diagnostic tool of laryngopharyngeal lesions. It reduces the number of patients requiring EUA. Further evaluation is empirical when the histopathology does not confirm the clinical suspicion of malignancy.

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