A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method

Sensors

Kwang-Su Kim¹  Woon-Hyuk Baek¹  Jung-Min Kim¹  Tae-Sik Yoon¹  Hyun Ho Lee²  Chi Jung Kang¹ 

[1] Department of Nano Science and Engineering, Myongji University, Gyeonggi 449-728, Korea; E-Mails:;Department of Chemical Engineering, Myongji University, Gyeonggi 449-728, Korea; E-Mail:

关键词: toluene;    gas sensor;    MIS structure;    nanoimprinting method;    titania;    nanopore;   

DOI  :  10.3390/s100100765

来源: mdpi

【 摘 要 】

Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO₂) pores with a diameter of 70∼80 nm using this method. This thin film had a Pd/TiO₂ nanoporous/SiO₂/Si MIS layered structure with Pd-TiO₂ as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO₂ surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO₂ interface work function, resulting in a change in the I–V characteristics.

【 授权许可】

CC BY   
©2010 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.