Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

Sensors

Fei Lyu³  Zhenyan Zhang³  Eng-Huat Toh²  Xinfu Liu²  Yinjie Ding²  Yifan Pan¹  Chengjie Li³  Li Li³  Jin Sha³ 

[1] Nanjing Foreign Language School, Nanjing 210008, China; E-Mail:;GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore; E-Mails:;School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China; E-Mails:

关键词: cross-like Hall plate;    sensitivity;    offset;    P-type covering layer;   

DOI  :  10.3390/s150100672

来源: mdpi

【 摘 要 】

This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.

【 授权许可】

CC BY   
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