Sensors | |
Performance Comparison of Cross-Like Hall Plates with Different Covering Layers | |
Fei Lyu3  Zhenyan Zhang3  Eng-Huat Toh2  Xinfu Liu2  Yinjie Ding2  Yifan Pan1  Chengjie Li3  Li Li3  Jin Sha3  | |
[1] Nanjing Foreign Language School, Nanjing 210008, China; E-Mail:;GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore; E-Mails:;School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China; E-Mails: | |
关键词: cross-like Hall plate; sensitivity; offset; P-type covering layer; | |
DOI : 10.3390/s150100672 | |
来源: mdpi | |
【 摘 要 】
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
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