Sensors | |
Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices | |
Nhi M. Doan2  Liangliang Qiang2  Zhe Li2  Santhisagar Vaddiraju2  Gregory W. Bishop1  James F. Rusling1  Fotios Papadimitrakopoulos2  | |
[1] Department of Chemistry, University of Connecticut, Storrs, CT 06269, USA; E-Mails:;Nanomaterials Optoelectronics Laboratory, Polymer Program, University of Connecticut, Storrs, CT 06269, USA; E-Mails: | |
关键词: nanowire; nanogaps; microelectrode arrays; sensor; immunoassay; microfluidic; photolithography; isotropic etching; | |
DOI : 10.3390/s150306091 | |
来源: mdpi | |
【 摘 要 】
Integrated microfluidic devices with nanosized array electrodes and microfiltration capabilities can greatly increase sensitivity and enhance automation in immunoassay devices. In this contribution, we utilize the edge-patterning method of thin aluminum (Al) films in order to form nano- to micron-sized gaps. Evaporation of high work-function metals (
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
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RO202003190015391ZK.pdf | 8153KB | download |