科技报告详细信息
Final Technical Report | |
drucker, jeff | |
关键词: nanowire; epitaxy; | |
DOI : 10.2172/1149731 RP-ID : DOE-ASU-ER46345-F PID : OSTI ID: 1149731 |
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美国|英语 | |
来源: SciTech Connect | |
【 摘 要 】
This project investigated the fundamental science of nanowire epitaxy using vapor-liquid-solid growth in the silicon-germanium material system. Ultrahigh vacuum chemical vapor deposition (UHV CVD) was the primary deposition method. Nanowires grown using UHV CVD were characterized ex situ using scanning electron microscopy and a variety of transmission electron microscopy techniques. In situ transmission electron microscopy was also employed to monitor growth in real time and was instrumental in elucidating growth mechanisms.
【 预 览 】
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183KB | download |