Novel 3D-Printed MEMS Magnetometer with Optical Detection

Proceedings

Steiner, Harald¹  Kahr, Matthias²  Hortschitz, Wilfried³  Stifter, Michael⁴ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: 3D printing;    magnetometer;    optical readout;    Lorentz force;   

DOI  :  10.3390/proceedings2130783

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper reports a novel 3D printed MEMS magnetometer with optical readout, which demonstrates the advantages of 3D printing technology in terms of rapid prototyping. Low-cost and fast product development cycles favour 3D printing as an effective tool. Sensitivity measurement with such devices indicate high accuracy and good structural performance, considering material and technological uncertainties. This paper is focusing on the novelty of the rapid, 3D-printing prototyping approach and verification of the working principle for printed MEMS magnetometers.

【 授权许可】

CC BY