3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

Proceedings

Hortschitz, Wilfried¹  Kahr, Matthias²  Steiner, Harald³  Stifter, Michael⁴ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, Wiener Neustadt 2700, Austria;Institute of Sensor and Actuator Systems, TU Wien, Vienna 1040, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: 3D-printing;    magnetometer;    optical readout;    lorentz force;    complient mechanism;   

DOI  :  10.3390/proceedings2130784

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables ‘true’ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector.

【 授权许可】

CC BY