Borosilicate Glass MEMS Lorentz Force Magnetometer

Proceedings

Steiner, Harald¹  Kahr, Matthias²  Hortschitz, Wilfried³  Domke, Matthias⁴ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;Research Centre for Microtechnology, Vorarlberg University of Applied Sciences, 6850 Dornbirn, Austria

关键词: magnetometer;    lorentz force;    borosilicate glass;    laser micromachining;   

DOI  :  10.3390/proceedings2130788

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper reports on a novel, miniaturized magnetomechanical transducer/sensor made of borosilicate glass with wide dynamic range. The prototype is manufactured with laser micromachining and ablation techniques. Compared to state of the art, borosilicate glass substrate offers the highest thermal shock resistance and is best suited for MEMS magnetometers, for aerospace and space applications or magnetic monitoring systems for diagnostics and plasma stability control of nuclear fusion experiments, where thermal shock resistance is a critical requirement.

【 授权许可】

CC BY