Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

Proceedings

Rocha, Luis Alexandre¹  Moreira, Eurico Esteves²  Gaspar, João³ 

[1] Author to whom correspondence should be addressed.;CMEMS-UM, University of Minho, 4800-058 Guimarães, Portugal;MeN, International and Iberian Nanotechnology Laboratory (INL), 4717-330 Braga, Portugal

关键词: MEMS;    magnetometer;    frequency modulated;    Lorentz force;   

DOI  :  10.3390/proceedings2131028

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.

【 授权许可】

CC BY