Optical and Morphological Characteristics of Nanostructured Titanium Dioxide Thin Films Prepared by DC Reactive Magnetron Sputtering Technique

International Conference on Materials Engineering and Science

Odah, Jafer Fahdel^1,3 ; Mawat, Mazin Mohammed^2 ; Mohamed, Ahmed Namah^3 ; Tuhaiwer, Akeel Shaker^3 ; Alaakol, Ashwaq Eyad^3

AlKarkh University of Science, Baghdad, Iraq^1

Wasit University, College of Medicine, Wasit, Iraq^2

Al Muthanna University, College of Science, Department of Physics, Samawa, Iraq^3

关键词: DC reactive magnetron sputtering;    Discharge currents;    Discharge electrode;    Electrode distances;    Morphological characteristic;    Nanostructured titanium;    Optical characteristics;    Plasma distribution;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/454/1/012032/pdf
DOI  :  10.1088/1757-899X/454/1/012032

来源: IOP

【 摘 要 】

In this work, the optical characteristics of nanostructured titanium dioxide thin films prepared by DC reactive magnetron sputtering technique. These characteristics were controlled by controlling the spatial distribution of plasma column generated between discharge electrodes throughout varying the inter-electrode distance from 2 to 5cm, discharge current from 10 to 50 mA and working pressure from 0.04 to 0.1 mbar. The absorption spectra, x-ray diffraction patterns and atomic force microscopy of the prepared films were recorded at different inter-electrode distances and compared to the published results. This is good attempt to optimize the optical characteristics of nanostructured titanium dioxide thin films for optical and spectral applications.