Characteristic of VHF plasma produced by balanced power feeding

11th Asia Pacific Conference on Plasma Science and Technology;25th Symposium on Plasma Science for Materials

Ogiwara, K.^1 ; Chen, W.^2 ; Uchino, K.^2 ; Kawai, Y.^2

Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-1 Kasugakoen, Kasuga, Fukuoka 816-8580, Japan^1

Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasugakoen, Kasuga, Fukuoka 816-8580, Japan^2

关键词: Discharge electrode;    Gas pressures;    High gas pressures;    Hybrid model;    Hydrogen plasmas;    Low applied voltages;    Power absorption;    Power feeding;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/441/1/012022/pdf
DOI  :  10.1088/1742-6596/441/1/012022

来源: IOP

【 摘 要 】

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.