Enhanced Electrochromic Properties by Improvement of Crystallinity for Sputtered WO3 Film

Coatings

Huai-jun Lin¹  Zhu-jie Xia¹  Zhi-guo Zhang¹  Peng Tang²  Qian Shi²  Hong-li Wang²  Yi-fan Su²  Ming-jiang Dai² 

[1] Institute of Advanced Wear and Corrosion Resistant and Functional Materials, Jinan University, Guangzhou 510632, China;The Key Lab of Guangdong for Modern Surface Engineering, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China;

关键词: DC reactive magnetron sputtering;    WO₃ thin film;    crystallinity;    electrochromic;    substrate temperature;   

DOI  :  10.3390/coatings10060577

来源: DOAJ

【 摘 要 】

Tungsten oxide (WO₃) is widely used as a functional material for “smart windows” due to its excellent electrochromic properties, however it is difficult to overcome the conflict between its optical modulation and cyclic stability. In this work, WO₃ thin films with different crystal structures were prepared by DC reactive magnetron sputtering method. The effects of substrate temperature on the structure, composition, and electrochromic properties of WO₃ films were investigated. The results show that the crystallinity of the WO₃ film increases with increasing deposition temperature, indicating that temperature plays an important role in controlling the structure of the WO₃ film. For WO₃ thin films formed at a substrate temperature of 573 K, the film is in an amorphous state to a crystalline transition state. From X-ray diffraction (XRD) analysis, the thin film showed a weak WO₃ crystallization peak, which was in the composite structure of amorphous and nanocrystalline. Which has the best electrochromic properties, with modulation amplitude of 73.1% and bleached state with a coloration efficiency of 42.9 cm²/C at a wavelength of 550 nm. Even after 1500 cycles, the optical modulation still contains 65.4%, delivering the best cyclic stability.

【 授权许可】

Unknown