Influence of pressure on the properties of AlN deposited by DC reactive magnetron sputtering on Si (100) substrate

Micro & nano letters

article

Tao Li¹  Jun Han¹  Yanhui Xing¹  Xuguang Deng²  Junshuai Li²  Li Zhang²  Fengfeng Shi¹  Lun Yu²  Chi Sun²  Xiaodong Zhang²  Baoshun Zhang² 

[1] Key Laboratory of Opto-electronics Technology, Ministry of Education, Department of Informatics, Beijing University of Technology;Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics;Suzhou Powerhouse Electronics Co. Ltd

关键词: surface morphology;    wide band gap semiconductors;    X-ray diffraction;    semiconductor epitaxial layers;    semiconductor growth;    gallium compounds;    crystal structure;    sputtered coatings;    sputter deposition;    III-V semiconductors;    refractive index;    buffer layers;    aluminium compounds;    atomic force microscopy;    Fourier transform infrared spectra;    ellipsometry;    silicon;    deposition pressure;    atomic force microscopy;    AlN films;    sputtering pressure;    gallium nitride epitaxial film;    DC reactive magnetron sputtering;    Si (100) substrate;    (002)-oriented aluminium nitride films;    direct-current magnetron sputtering;    surface morphology;    crystal structure;    X-ray diffraction;    stress analyser;    ellipsometer;    Fourier transform infrared spectrometer;    tensile stress;    refractive index;    pressure 0.12 Pa to 0.5 Pa;    AlN;    Si;   

DOI  :  10.1049/mnl.2018.5293

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Piroxicam is a non-steroidal anti-inflammatory drug (NSAID) used in the treatment of musculo-skeletal and joint disorders. The problem with this drug is its poor solubility in water and hence poor bioavailability after oral administration. In order to improve its solubility and dissolution behavior, hydrophilic additives such as starch, lactose, superdisintegrants including crospovidone (C.P), cross carmellose sodium (CCS), and sodium starch glycolate (SSG) were physically dry mixed with the drug by simple trituration. The improvement in the solubility in 0.1 N HCl was obtained as the amount of starch or lactose increased in the physical mixture, while for superdisintegrants, they further improve the solubility when they are present in small amount and the best improvement was gained with SSG. To study the effect of these additives on the dissolution of the drug, piroxicam capsules were prepared by simple trituration of the drug with starch or lactose or combination of lactose: starch (2:1)by weight with or with out the presence of SSG. The dissolution profiles of these preparations were analyzed using similarity factor f2. Best results were obtained when the drug was triturated with starch and SSG or with acombinaton of  lactose: starch (2:1) by weight with SSG . The dissolution profiles of these preparations were similar to that of the marketed Feldene ® Pfizer 20 mg capsules with f2 74.6 and 80.37 respectively.

【 授权许可】

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