Peculiarities of using nanomaterials based on SiO2-SnO2-In2O3 as sensitive elements of vacuum sensors

25th International Conference on Vacuum Technique and Technology

Averin, I.A.^1 ; Karmanov, A.A.^1 ; Igoshina, S.E.^1 ; Pronin, I.A.^1 ; Yakushova, N.D.^1 ; Moshnikov, V.A.^1,2

Department of Nano- and Microelectronics, Penza State University, Penza

440026, Russia^1

Department of Micro- and Nanoelectronics, Saint-Petersburg Electrotechnical University, Saint-Petersburg

197376, Russia^2

关键词: Indium oxide;    Mass fraction;    Sensitive elements;    Three-component system;    Vacuum sensors;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012005/pdf
DOI  :  10.1088/1757-899X/387/1/012005

来源: IOP

【 摘 要 】

Experimental data on the use of nanomaterials based on SiO2-SnO2-In2O3 as sensitive elements of vacuum sensors are presented. It is shown that the sensory response of a three-component system under consideration is determined by the mass fraction of indium oxide. It was determined that depending on the content of In2O3 the nanomaterials under study can be characterized by a decrease and an increase in resistance when the pressure is reduced lower than atmospheric one. The mechanisms that potentially correspond to the observed phenomenon are considered.