Electro-physical and mechanical properties of films based on zirconium oxide in sensitive elements of MEMS

13th International Conference on Films and Coatings

Korobova, N.E.^1 ; Timoshenkov, S.P.^1

Department of Microelectronics, National Research University of Electronic Technology MIET, Zelenograd, Moscow

124498, Russia^1

关键词: Metrological characteristics;    Micro-system technologies;    Operating condition;    Physical and mechanical properties;    Sensitive elements;    Shock and vibration;    Structural feature;    Structure property;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/857/1/012020/pdf
DOI  :  10.1088/1742-6596/857/1/012020

来源: IOP

【 摘 要 】

Studies have been carried out to obtain functional films based on zirconium oxide (ZrO2, PZT) and to ensure the stability of their metrological characteristics under harsh operating conditions - over a wide range of temperatures, thermal shock and vibration for use in microsystem technology. The structural features of film structures for establishing the relationship "structure-property", as well as assessing the role of defects have been investigated.