Temperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors

2nd International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies"

Veselov, D.S.^1 ; Voronov, Y.A.^1

Micro - and Nanoelectronics Department, National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe shosse 31, Moscow

115409, Russia^1

关键词: Dielectric membranes;    Heat value;    Membrane material;    Semiconductor gas sensors;    Sensitive elements;    Sensitive layers;    Synopsys;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/498/1/012037/pdf
DOI  :  10.1088/1757-899X/498/1/012037

来源: IOP

【 摘 要 】

The aim of this article is to show a simulation of temperature distribution on dielectric membrane structures with membranes of different dielectric materials in the measuring mode of a semiconductor gas sensor. The simulation results were obtained using the software package Synopsys TCAD. In various moments of the measuring cycle were obtained two-dimensional temperature distributions on membrane structures. Dependencies of temperature versus time for the variety of the coordinates on membranes, temperature versus coordinates at the sensitive layer area's highest heat value and temperature versus time in the center of the membranes are presented. Recommendations are given for the selection of membrane material for the heat-insulating membrane structure of sensitive elements for semiconductor gas sensors.