A new type of vacuum sensors with sensitive elements based on multicomponent oxide nanomaterials with fractal structures

24th International Conference on Vacuum Technique and Technology

Karmanov, A.A.^1 ; Averin, I.A.^1 ; Pronin, I.A.^1 ; Yakushova, N.D.^1 ; Igoshina, S.E.^1 ; Moshnikov, V.A.^2 ; Vishnevskaya, G.V.^1

Department of Nano- and Microelectronics, Penza State University, Penza

440026, Russia^1

Department of Micro- and Nanoelectronics, Saint Petersburg Electrotechnical University, LETI, St.Petersburg

197376, Russia^2

关键词: Ambient pressures;    Fractal structures;    Mass fraction;    Multi-component oxides;    Sensitive elements;    Three component;    Two-component;    Vacuum sensors;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012005/pdf
DOI  :  10.1088/1742-6596/872/1/012005

来源: IOP

【 摘 要 】

A new type of vacuum sensors with sensitive elements based on two- and three-component oxide nanomaterials with fractal structures is proposed. It is shown that a sensory response for two-component oxide systems based on SiO2-SnO2is determined by their quantitative composition - mass fraction of tin dioxide. An increase in sensitivity to changes in ambient pressure for three-component oxide nanomaterials has been demonstrated.