Metallic coatings for MEMS structures

25th International Conference on Vacuum Technique and Technology

Korlyakov, A.V.^1 ; Mikhailova, O.N.^1 ; Serkov, A.V.^1

Saint Petersburg State Electrotechnical University LETI, Russia^1

关键词: Film deposition;    Mechanical stress;    MEMS-structure;    Metallic coating;    Thin metal films;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012040/pdf
DOI  :  10.1088/1757-899X/387/1/012040

来源: IOP

【 摘 要 】

This paper presents the results of mechanical stresses measurement in thin metal films in the composition of MEMS structures. The main requirements for metal films for MEMS are presented, recommendations for choosing methods of film deposition are given.