Collision-Free Structure Using Thin-Film Magnet For Electrostatic Energy Harvester

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Yoshii, S.^1 ; Yamaguchi, K.^1 ; Fujita, T.^1 ; Kanda, K.^1 ; Maenaka, K.^1

Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo

671-2280, Japan^1

关键词: Collision-free;    Electrostatic energies;    MEMS-structure;    Nd-Fe-B magnets;    Nd-Fe-B thin films;    Repulsive forces;    Thin film magnets;    Vibration energy harvesters;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012013/pdf
DOI  :  10.1088/1742-6596/773/1/012013

来源: IOP

【 摘 要 】

This paper proposes collision-free structure using NdFeB thin-film magnet for vibration energy harvesters. By using stripe shaped NdFeB magnet array on the Si MEMS structure, we finally obtained 3 mN of magnetic repulsive force on 8 × 8 mm2specimen with 40 μm air-gap.