Simulation of heat conductivity and charging processes in polar dielectrics induced by electron beam exposure

International Scientific Conference on "Radiation-Thermal Effects and Processes in Inorganic Materials"

材料科学;物理学

Maslovskaya, A.^1 ; Pavelchuk, A.^1

Physics Engineering Department, Amur State University, 21, Ignatievskoe shosse, Blagoveshchensk

675027, Russia^1

关键词: Charging characteristics;    Charging process;    Electron transport;    Electron-beam exposure;    Experimental parameters;    Field effects;    Point methods;    Polar dielectrics;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/81/1/012119/pdf
DOI  :  10.1088/1757-899X/81/1/012119

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

The article presents results of simulation of thermal and charging processes arising in polar dielectric materials analysed with scanning electron microscope techniques. Monte- Carlo simulation of electron transport in irradiated target was evaluated to realize field effect models. Simulation of thermal load and charging characteristics was performed using net-point methods. The analysis of injection, thermal and charging processes induced by electron irradiation in ferroelectrics subjected to experimental parameters are also discussed.