Sticking non-stick: Surface and Structure control of Diamond-like Carbon in Plasma Enhanced Chemical Vapour Deposition

6th International Workshop & Summer School on Plasma Physics 2014

Jones, B.J.^1,2 ; Nelson, N.^3

School of Materials, University of Manchester, Oxford Road, Manchester

M13 9PL UK, United Kingdom^1

School of Applied Sciences, University of Huddersfield, Queensgate, West Yorkshire, Huddersfield

HD1 3DH UK, United Kingdom^2

School of Engineering and Design, Brunel University, Kingston Lane, Middlesex, Uxbridge

UB8 3PH, United Kingdom^3

关键词: Device characteristics;    Device properties;    Diamond like carbon;    Plasma enhanced chemical vapour deposition;    Plasma enhanced chemical vapour depositions (PECVD);    Structure control;    Substrate conditions;    Thin film microstructures;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/768/1/012011/pdf
DOI  :  10.1088/1742-6596/768/1/012011

来源: IOP

【 摘 要 】

This short review article explores the practical use of diamond-like carbon (DLC) produced by plasma enhanced chemical vapour deposition (PECVD). Using as an example issues relating to the DLC coating of a hand-held surgical device, we draw on previous works using atomic force microscopy, X-ray photoelectron spectroscopy, Raman spectroscopy, scanning electron microscopy, tensiometry and electron paramagnetic resonance. Utilising data from these techniques, we examine the surface structure, substrate-film interface and thin film microstructure, such as sp2/sp3ratio (graphitic/diamond-like bonding ratio) and sp2clustering. We explore the variations in parameters describing these characteristics, and relate these to the final device properties such as friction, wear resistance, and diffusion barrier integrity. The material and device characteristics are linked to the initial plasma and substrate conditions.