Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

Bulletin of materials science

S B Singh¹  D Bhattacharya²  R M Dey³  N Chand¹  D S Patil¹  A K Tyagi⁵  S K Kulkarni³  S Dash⁵  A Biswas²  M Pandey⁴ 

[1] Laser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400 085, India$$Laser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400 085, IndiaLaser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400 085, India$$;Spectroscopy Division, Bhabha Atomic Research Centre, Mumbai 400 085, India$$Spectroscopy Division, Bhabha Atomic Research Centre, Mumbai 400 085, IndiaSpectroscopy Division, Bhabha Atomic Research Centre, Mumbai 400 085, India$$;Department of Physics, University of Pune, Pune 411 007, India$$Department of Physics, University of Pune, Pune 411 007, IndiaDepartment of Physics, University of Pune, Pune 411 007, India$$;High Pressure Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India$$High Pressure Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, IndiaHigh Pressure Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India$$;Materials Science Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603 102, India$$Materials Science Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603 102, IndiaMaterials Science Division, Indira Gandhi Centre for Atomic Research, Kalpakkam 603 102, India$$

关键词: Diamond like carbon;    chemical vapour deposition;    mechanical properties;    Raman spectroscopy.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Diamond like carbon (DLC) films were deposited on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapour deposition (CVD) process using plasma of argon and methane gases. During deposition, a d.c. self-bias was applied to the substrates by application of 13.56 MHz rf power. DLC films deposited at three different bias voltages (�??60 V, �??100 V and �??150 V) were characterized by FTIR, Raman spectroscopy and spectroscopic ellipsometry to study the variation in the bonding and optical properties of the deposited coatings with process parameters. The mechanical properties such as hardness and elastic modulus were measured by load depth sensing indentation technique. The DLC film deposited at �??100 V bias exhibit high hardness (∼ 19 GPa), high elastic modulus (∼ 160 GPa) and high refractive index (∼ 2.16�??2.26) as compared to films deposited at �??60 V and �??150 V substrate bias. This study clearly shows the significance of substrate bias in controlling the optical and mechanical properties of DLC films.

【 授权许可】

Unknown