Preparation and characterization DLC thin films using atmospheric pressure plasma Jet

International Conference on Materials Engineering and Science

Abbass, A.A.^1 ; Kadhem, S.J.^1

Department of Physics, College of Science, University of Baghdad, Baghdad, Iraq^1

关键词: Alternating voltages;    Atmospheric pressure plasma jets;    Carbon Nano-Particles;    Diamond like carbon;    Hydrogenated films;    Optical energy gap;    UV-visible spectrophotometer;    X ray diffractometers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/454/1/012065/pdf
DOI  :  10.1088/1757-899X/454/1/012065

来源: IOP

【 摘 要 】

Diamond-like carbon, amorphous hydrogenated films forms of carbon, were pretreated from cyclohexane (C6H12) liquid using plasma jet which operates with alternating voltage 7.5kv and frequency 28kHz. The plasma Separates molecules of cyclohexane and Transform it into carbon nanoparticles. The effect of argon flow rate (0.5, 1 and 1.5 L/min) on the optical and chemical bonding properties of the films were investigated. These films were characterized by UV-Visible spectrophotometer, X-ray diffractometer (XRD) Raman spectroscopy and scanning electron microscopy (SEM). The main absorption appears around 296, 299 and 309nm at the three flow rate of argon gas. The value of the optical energy gap is 3.37, 3.55 and 3.68 eV at a different flow rate of argon gas. For XRD analysis, The presence of diamond peaks and graphite peaks in the x-ray spectrum for these films Indicates that there is an occurrence of local ordered sp3 and sp2 for carbon domains and graphite respectively. Raman spectroscopy analysis revealed two broad bands D band and G band. The upshift of D band of diamond and downshift of the G band of graphite with is indicative of the presence of DLC films.