FINAL Microstructure-Property Study of Cu1-xTax Thin Films

thin films;nanolaminate;nanolayers;sputter deposition;copper;tantalum

Jackson, Shannon Marie ; J.M. Rigsbee, Committee Chair,Zlatko Sitar, Committee Member,Afsaneh Rabiei, Committee Member,Jackson, Shannon Marie ; J.M. Rigsbee ; Committee Chair ; Zlatko Sitar ; Committee Member ; Afsaneh Rabiei ; Committee Member

University:North Carolina State University

关键词: thin films;    nanolaminate;    nanolayers;    sputter deposition;    copper;    tantalum;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/2500/etd.pdf?sequence=1&isAllowed=y

美国|英语

来源: null

【 摘 要 】

A series of Cu1-xTax (x = 0.05 to 0.5) thin films have been produced by DC magnetron sputter deposition using co-deposition (alloy) and sequential (layered) deposition modes at ambient temperature.The nanoscale microstructures of these non-equilibrium "alloy" films have been investigated chemically and structurally using x-ray diffraction, scanning electron microscopy and high-resolution transmission electron microscopy. The mechanical properties were measured via nanotriboligical and nanoindentation studies of selected samples to determine the affect of Ta composition and nanolayer thickness.