Meso-scale controlled motion for a microfluidic drop ejector.

Galambos, Paul C. ; Givler, Richard C. ; Pohl, Kenneth Roy ; Czaplewski, David A. ; Luck, David L. ; Braithwaite, Mark J. ; Atwood, Clinton L. ; Benavides, Gilbert Lawrence

Sandia National Laboratories

关键词: Flowmeters;    Miniaturization;    Droplets;    Microelectromechanical Systems.;    Mesoscale-Materials;   

DOI  :  10.2172/920732
RP-ID  :  SAND2004-6437
RP-ID  :  AC04-94AL85000
RP-ID  :  920732

美国|英语

来源: UNT Digital Library

【 摘 要 】

The objective of this LDRD was to develop a uniquely capable, novel droplet solution based manufacturing system built around a new MEMS drop ejector. The development all the working subsystems required was completed, leaving the integration of these subsystems into a working prototype still left to accomplish. This LDRD report will focus on the three main subsystems: (1) MEMS drop ejector--the MEMS ''sideshooter'' effectively ejected 0.25 pl drops at 10 m/s, (2) packaging--a compact ejector package based on a modified EMDIP (Electro-Microfluidic Dual In-line Package--SAND2002-1941) was fabricated, and (3) a vision/stage system allowing precise ejector package positioning in 3 dimensions above a target was developed.