MEMS characterization LDRD:Final report (FY03-FY05).

Ordonez, Therese A. ; Zavadil, Kevin Robert ; Brown, Jason R. ; Kent, Michael Stuart ; Simpson, Regina Lynn ; Tallant, David Robert ; Ohlhausen, James Anthony ; Garcia, Manuel Joseph ; Thornberg, Steven Michael

Sandia National Laboratories

关键词: Miniaturization;    Mass Spectrometry.;    Microelectronic Circuits;    42 Engineering;    Microelectromechanical Systems.;   

DOI  :  10.2172/883489
RP-ID  :  SAND2005-7083
RP-ID  :  AC04-94AL85000
RP-ID  :  883489

美国|英语

来源: UNT Digital Library

【 摘 要 】

No abstract prepared.