Defect Analysis of Roll-to-Roll SAIL Manufactured Flexible Display Backplanes

Taussig, Carl ; Elder, Richard E. ; Jackson, Warren B. ; Jeans, Albert ; Jam, Mehrban ; Holland, Ed ; Luo, Hao ; Maltabes, John ; Perlov, Craig ; Trovinger, Steven ; Almanza-Workman, Marcia ; Garcia, Robert A. ; Kim, HanJun ; Kwon, Ohseung ; Jeffrey, Frank

HP Development Company

关键词: SAIL;    flexible displays;    roll-to-roll;   

RP-ID  :  HPL-2011-35

学科分类：计算机科学（综合）

美国|英语

来源: HP Labs

【 摘 要 】

HP and Phicot have made the world's first roll-to-roll (R2R) manufactured active matrix displays. Currently we are developing a wrist-worn solar powered display for the U.S. Army. As we scale from research to preproduction on our 1/3 meter wide pilot line defect analysis and mitigation is our primary focus. In this presentation we will review the self-aligned imprint lithography (SAIL) process and discuss defects we observe, and the tools, and processes we have developed to detect and eliminate them.