Ion beam sputtering induced ripple formation in thin metal films

SURFACE SCIENCE

卷:554

Article

Karmakar, P ; Ghose, D

关键词: polycrystalline thin films;    metallic films;    sputtering;    surface structure;    morphology;    roughness;    and topography;    atomic force microscopy;   

DOI  :  10.1016/j.susc.2004.02.020

来源: Elsevier

【 摘 要 】

We have observed the formation of ripples in a number of thin metal films, e.g. Au, Pt, Ag, Cu and Co under Ar+ ion beam sputtering at grazing incidence. The structures are found to be quite stable under ambient conditions. The results show that the ripple formation in polycrystalline metallic films relies on the erosion-induced surface instability similar to that in amorphous materials. (C) 2004 Elsevier B.V. All rights reserved.

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