Final Report: Mechanisms of sputter ripple formation: coupling among energetic ions, surface kinetics, stress and composition

Chason, Eric ; Shenoy, Vivek

关键词: sputtering;    surface evolution;    thin film;    stress;   

DOI  :  10.2172/1060286
RP-ID  :  1
PID  :  OSTI ID: 1060286

学科分类：材料科学（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

Self-organized pattern formation enables the creation of nanoscale surface structures over large areas based on fundamental physical processes rather than an applied template. Low energy ion bombardment is one such method that induces the spontaneous formation of a wide variety of interesting morphological features (e.g., sputter ripples and/or quantum dots). This program focused on the processes controlling sputter ripple formation and the kinetics controlling the evolution of surfaces and nanostructures in high flux environments. This was done by using systematic, quantitative experiments to measure ripple formation under a variety of processing conditions coupled with modeling to interpret the results.