Design, construction, and optimization of a magnetron sputtering system for urania deposition

urania deposition via magnetron sputtering

Gennardo, David J. ; Heuser ; Brent J. ; Stubbins ; James F.

关键词: urania deposition via magnetron sputtering;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/16227/1_Gennardo_David.pdf?sequence=4&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

A magnetron sputtering system was designed and constructed in accordance with the Nuclear Energy Research Initiative for Consortia (NERI-C) project on the ―Performance of actinide-containing fuel matrices under extreme radiation and temperature environments.‖ The system will initially be used to produce urania (UO2) films with actinide surrogates that will then be irradiated at high-temperature and used in several fuel characterization studies. Preliminary work will also use ceria (CeO2) as a surrogate for urania.A basic reference for magnetron sputtering concepts and film properties is included. The overall design of the system is then supplied as well as information with regards to component selection. Particular detail has been provided for the gas distribution system and associated components because they were the primary responsibility of the author. The work included the procurement of standard and custom-order components which the author then used in the construction of a power supply for the operation of solenoid valves and the construction of a gas manifold. Information containing details pertinent to single crystal growth of urania and ceria including comparisons with other systems and their respective operating parameters is also provided.It was also the responsibility of the author to provide quantitative analysis on the behavior of the Gas Distribution system once it was operational; this represents the second half of the thesis. Modeling of the gas distribution system was performed which encompassed the predicted operating range for film growth in the system. An accurate analytical model could not be determined and the results suggested that this is mostly due to the complex geometry of the system and flow regime it was operated within. Experimental models can be further developed once exact operating parameters have been established.Finally, recommendations for future modeling and construction work are provided. The latter includes previously selected components prescribed by the final design as well as suggested future enhancements for increased functionality.