Fabrication of three-dimensional SU-8 microchannels by proton beam writing for microfluidics applications: Fluid flow characterisation

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:348

Article; Proceedings Paper

Al-Shehri, S.¹  Palitsin, V.¹  Webb, R. P.¹  Grime, G. W.¹ 

[1] Univ Surrey, Ion Beam Ctr, Adv Technol Inst, Guildford GU2 7XH, Surrey, England

关键词: Proton beam writing;    Microfabrication;    Microfluidics;    Fluid characterisation;    Computational fluid dynamics (CFD);   

DOI  :  10.1016/j.nimb.2014.12.014

来源: Elsevier

【 摘 要 】

The proton beam writing (PBW) technique was used to fabricate microfluidic structures in SU-8 resist. A network of the buried channels was fabricated as part of a project to develop functional microfluidic device for neuronal studies and self-powered microfluidics. Protons with energies between 2.5 MeV and 0.75 MeV were used to fabricate the buried channels with a minimum feature size of around 1 mu m and depths of 40-55 mu m. Roughness of channels sidewalls was around 2.5 nm rms. Exposure regime and examples of functional networks fabricated using PBW are described. COMSOL Multiphysics (R) software was used to model the flow characteristics of fluid in the SU-8 microchannels structured by PBW. The results obtained using PEW are compared with the structures fabricated by UV-lithography. (C) 2014 Elsevier B.V. All rights reserved.

【 授权许可】

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