科技报告详细信息
Exploring the Feasibility of Fabricating Micron-scale Components using Microcontact Printing.
Myers, R. L. ; Ritchey, M. B. ; Stokes, R. N. ; Casias, A. L. ; Adams, D. P. ; Oliver, A. D. ; Emerson, J. A.
Technical Information Center Oak Ridge Tennessee
关键词: Microfabrication;    Feasibility studies;    Alignment;    Fabrication;    Gold;   
RP-ID  :  DE2004820892
学科分类:工程和技术(综合)
美国|英语
来源: National Technical Reports Library
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【 摘 要 】
Many microfabrication techniques are being developed for applications in microelectronics, microsensors, and micro-optics. Since the advent of microcomponents, designers have been forced to modify their designs to include limitations of current technology, such as the inability to make three-dimensional structures and the need for piece-part assembly. Many groups have successfully transferred a wide variety of patterns to both two-dimensional and three-dimensional substrates using microcontact printing. Microcontact printing is a technique in which a self-assembled monolayer (SAM) is patterned onto a substrate by transfer printing. The patterned layer can act as an etch resist or a foundation upon which to build new types of microstructures. We created a gold pattern with features as small as 1.2 micrometers using microcontact printing and subsequent processing. This approach looks promising for constructing single-level structures such as microelectrode arrays and sensors. It can be a viable technique for creating three-dimensional structures such as microcoils and microsprings if the right equipment is available to achieve proper alignment, and if a means is available to connect the final parts to other components in subsequent assembly operations. Microcontact printing provides a wide variety of new opportunities in the fabrication of microcomponents, and increases the options of designers.
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