Drastic structure changes in pre-damaged GaAs crystals irradiated with swift heavy ions

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:360

Article

Komarov, F.¹  Uglov, V.²  Vlasukova, L.²  Didyk, A.³  Zlotski, S.²  Yuvchenko, V.¹ 

[1] Inst Appl Phys Problems, Minsk 220045, BELARUS

[2] Belarusian State Univ, Minsk 220030, BELARUS

[3] JINR, Flerov Lab Nucl React, Dubna 141980, Russia

关键词: Swift heavy ions;    Gallium arsenide;    Electron pre-damaging;    Defect formation;   

DOI  :  10.1016/j.nimb.2015.08.064

来源: Elsevier

【 摘 要 】

We have studied structural transformations in pre-damaged GaAs crystals irradiated with high-energy Bi ions (710 MeV, 4.3 x 10(12) cm(-2)). The pre-damage has been created via irradiation with swift electrons (4 MeV, 4 x 10(12) cm(-2)). A structural disorder in irradiated samples has been investigated by means of selective chemical etching (SCE) and X-ray diffraction (XRD) in combination with the material layer-by-layer removal. Character of lattice deformation in the double-irradiated sample gives an evidence of subsurface region's swelling. Strong lattice distortion has been found in the region of Bi ion ranges at the depth of about 30 mu m. The nature of this effect is discussed. (C) 2015 Published by Elsevier B.V.

【 授权许可】

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