Fabrication of Ge-ZnS multilayered optical filters for mid-infrared applications

THIN SOLID FILMS

卷:719

Article

Duris, M.^1,2  Deubel, D.¹  Bodiou, L.²  Vaudry, C.¹  Keromnes, J-C¹  Charrier, J.² 

[1] KERDRY, 5 Rue Louis de Broglie, F-22300 Lannion, France

[2] Univ Rennes, CNRS, Inst FOTON UMR 6082, F-22305 Lannion, France

关键词: Broadband antireflection coating;    Dichroic filter;    Ion-assisted deposition;    Electron beam evaporation;    Germanium;    Zinc sulphide;   

DOI  :  10.1016/j.tsf.2020.138488

来源: Elsevier

【 摘 要 】

Germanium/Zinc Sulphide (Ge/ZnS) single and multilayers are deposited by ion assisted electron beam deposition on Silicon substrates for applications in the 2-15 mu m wavelength region. Refractive indices of Ge and ZnS thin films are extracted from measured reflectance and transmittance spectra. Several types of mid-infrared filters (high-, anti-reflection coatings and dichroic filters) with a number of layers ranging from 3 to 29 are then designed and deposited. The optical responses of fabricated mid-infrared filters show a good agreement between experimental spectra and simulation in the case of highand anti-reflection coatings in the long-wave infrared but also for dichroic filters with a low transmittance in the mid-wave infrared and broadband bandpass in the long-wave infrared.

【 授权许可】

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