Formation of isolated carbon nanofibers with hot-wire CVD using nanosphere lithography as catalyst patterning technique

THIN SOLID FILMS

卷:517

Article; Proceedings Paper

Houweling, Z. S.¹  Verlaan, V.¹  ten Grotenhuis, G. T.¹  Schropp, R. E. I.¹ 

[1] Univ Utrecht, Fac Sci, Debye Inst Nanomat Sci, NL-3508 TA Utrecht, Netherlands

关键词: Hot-wire CVD;    Carbon nanotubes;    Nanosphere lithography;   

DOI  :  10.1016/j.tsf.2009.01.063

来源: Elsevier

【 摘 要 】

Recently the site-density control of carbon nanotubes (CNTs) has attracted much attention as this has become critical for its many applications. To obtain an ordered array of catalyst nanoparticles with good monodispersity nanosphere lithography (NSL) is used. These nanoparticles are tested as catalyst sites in hot-wire chemical vapor deposition (HWCVD) of carbon nanostructures. Aside from using NSL also nickel (Ni) nano-islands are made by thermal annealing of a thin Ni film and tested as catalyst sites. Multiwall CNTs, isolated carbon nanofibres, and other nanostructures have been deposited using HWCVD. Tungsten filaments held at similar to 2000 degrees C are used to decompose a mixture of ammonia, methane and hydrogen. The structures have been characterized with Scanning Electron Microscopy, High Resolution Transmission Electron Microscopy, Raman spectroscopy and Rutherford Backscattering Spectroscopy. Crown Copyright (C) 2009 Published by Elsevier B.V. All rights reserved.

【 授权许可】

Free