Piezoresistive silicon thin film sensor array for biomedical applications

THIN SOLID FILMS

卷:519

Article; Proceedings Paper

Alpuim, P.¹  Correia, V.^1,2  Marins, E. S.¹  Rocha, J. G.²  Trindade, I. G.³  Lanceros-Mendez, S.¹ 

[1] Univ Minho, Ctr Phys, P-4800058 Guimaraes, Portugal

[2] Univ Minho, Algoritmi Res Ctr, P-4800058 Guimaraes, Portugal

[3] Univ Beira Interior, Dept Text Sci & Technol, P-6200 Covilha, Portugal

关键词: Hot-wire CVD;    Nanocrystalline silicon;    Thin films;    Piezoresistance;    Flexible electronics;    Sensors;   

DOI  :  10.1016/j.tsf.2011.01.300

来源: Elsevier

【 摘 要 】

N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor -28. were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 degrees C. The piezoresistive response under cyclic quasi-static and dynamical (up to 100 Hz) load conditions is reported. Test structures, consisting of microresistors having lateral dimensions in the range from 50 to 100 mu m and thickness of 120 nm were defined in an array by reactive ion etching. Metallic pads, forming ohmic contacts to the sensing elements, were defined by a lift-off process. A readout circuit for the array consisting in a mutiplexer on each row and column of the matrix is proposed. The digital data will be processed, interpreted and stored internally by an ultra low-power micro controller, also responsible for the communication of two-way wireless data, e.g. from inside to outside the human body. (C) 2011 Elsevier B.V. All rights reserved.

【 授权许可】

Free