Effect of Al content on the hardness and thermal stability study of AlTiN and AlTiBN coatings deposited by HiPIMS

SURFACE & COATINGS TECHNOLOGY

卷:422

Article; Proceedings Paper

Mendez, A.^1,2,3  Monclus, M. A.²  Santiago, J. A.³  Fernandez-Martinez, I.³  Rojas, T. C.⁴  Garcia-Molleja, J.²  Avella, M.²  Dams, N.⁵  Panizo-Laiz, M.^6,7  Molina-Aldareguia, J. M.² 

[1] Univ Politecn Madrid, ETS Ingenieros Caminos, C Prof Aranguren S-N, Madrid 28040, Spain

[2] IMDEA Mat Inst, C Eric Kandel 2, Madrid 28906, Spain

[3] Nano4Energy SL, C Jose Gutierrez Abascal 2, Madrid 28006, Spain

[4] Univ Seville, CSIC, Inst Ciencia Mat Sevilla, Avda Amer Vespucio 49, Seville 41092, Andalucia, Spain

[5] PVT Plasma & Vakuum Techn GmbH, Rudolf Diesel Str 7, D-64625 Bensheim, Hesse, Germany

[6] Univ Politecn Madrid, ETS Ingn Ind, Dept Fis Aplicada & Ingenieros Mat, C Jose Gutierrez Abascal 2, Madrid 28006, Spain

[7] Inst Fus Nucl Guillermo Velarde, C Jose Gutierrez Abascal 2, Madrid 28006, Spain

关键词: Coating;    Nitride;    Nanocomposite;    High temperature;    Hardness;    HiPIMS;   

DOI  :  10.1016/j.surfcoat.2021.127513

来源: Elsevier

【 摘 要 】

The microstructure, mechanical properties and thermal stability of AT(x)Ti(1-x)N and Al1Ti1-xBN coatings grown by reactive high-power impulse magnetron sputtering (HiPIMS) have been analyzed as a function of Al/(Al + Ti) ratio (x) between 0.5 and 0.8. The coatings were predominantly formed by a face-centered cubic Ti(Al)N crystalline phase, both with and without B, even for x ratios as high as 0.6, which is higher than the ratio typically encountered for AlxTi1-xN coatings deposited by reactive magnetron sputtering. B doping, in combination with the highly energetic deposition conditions offered by HiPIMS, results in the suppression of the columnar grain morphology typically encountered in AlxTi1-xN coatings. On the contrary, the AlxTi1-xN coatings grown by HiPIMS present a dense nanocomposite type microstructure, formed by nanocrystalline Ti(Al) N domains and amorphous regions composed of Ti(Al)B 2 and BN. As a result, high-Al content (x approximate to 0.6) AlxTi1-xN coatings grown by HiPIMS offer higher hardness, elasticity and fracture toughness than AlxTi1-xN coatings. Moreover, the thermal stability and the hot hardness are substantially enhanced, delaying the onset of formation of the detrimental hexagonal AlN phase from 850 degrees C in the case of Al0.6Ti0.4N, to 1000 degrees C in the case of Al0.6Ti0.4N.

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