Light-optimized photovoltaic self-powered NO2 gas sensing based on black silicon

SENSORS AND ACTUATORS B-CHEMICAL

卷:340

Article

Zhao, Yang¹  Liu, Xiao-Long^1,5  Ma, Sheng-Xiang¹  Wang, Wen-Jing¹  Ning, Xi-Jing²  Zhao, Li^3,4  Zhuang, Jun¹ 

[1] Fudan Univ, Shanghai Ultraprecis Opt Mfg Engn Ctr, Sch Informat Sci & Technol, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China

[2] Fudan Univ, Inst Modern Phys, Dept Nucl Sci & Technol, Appl Ion Beam Phys Lab, Shanghai 200433, Peoples R China

[3] Fudan Univ, Collaborat Innovat Ctr Adv Microstruct, State Key Lab Surface Phys, Shanghai 200433, Peoples R China

[4] Fudan Univ, Dept Phys, Shanghai 200433, Peoples R China

[5] Aalto Univ, Dept Elect & Nanoengn, Espoo 02150, Finland

关键词: Black silicon;    Gas sensor;    Self-powered gas sensing;    Lateral photovoltaic effect;    Nitrogen dioxide;   

DOI  :  10.1016/j.snb.2021.129985

来源: Elsevier

【 摘 要 】

The NO2 sensing performance of a special lateral photovoltaic self-powered gas sensor based on the N-hyperdoped microstructured silicon (N-Si) is systematically studied under the different light illumination. The dependence of sensing characteristics on light intensity and wavelength is obtained, respectively. Results show that the sensing properties can be changed effectively by the different intensities and wavelengths, suggesting that a multidimensional regulation/optimization for the sensing characteristics is possible by light. More interestingly, the light with wavelength of 940 nm and intensity of similar to 18 mu W/cm(2) could bring a comprehensive optimization for gas sensing, under which the N-Si sensor exhibits the excellent overall performance with simultaneously the low light power needed, good gas response, high sensitivity, wide detectable range and short response time at room temperature.

【 授权许可】

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