Highly Scaled GaN Complementary Technology on a Silicon Substrate

卷:70

Article

关键词: OHMIC CONTACT;    CHANNEL;    INTEGRATION;    FINFET;    FET;   

DOI  :  10.1109/TED.2023.3247684

来源: SCIE

【 摘 要 】

article reports on the scaling of GaN complementary technology (CT) on a silicon substrate to push its performance limits for circuit-level applications. The highly scaled self-aligned (SA) p-channel FinFET (a fin width of 20 nm) achieved an I-D,I-max of -300 mA/mm and an R-ON of 27 O.mm, a record for metal organic chemical vapor deposition (MOCVD)-grown III-nitride p-FETs. A systematic study on impact of fin width scaling and recess depth in these transistors was conducted. A new SA scaled n-channel p-GaN-gate FET (n-FET) process, compat-ible with the p-FinFET, demonstrated enhancement-mode (E-mode) n-FETs (L-G = 200 nm, I-D,I-max = 525 mA/mm, and RON = 2.9 O.mm) on the same epitaxial platform. The p-FETs and n-FETs feature competitive performance in their respective categories and, when taken together, offer a leading solution for GaN CT on a silicon substrate.

【 授权许可】

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