Investigation of anodic silicon dioxide thin films for microelectromechanical systems applications

Micro & nano letters

article

Akarapu Ashok¹  Prem Pal¹ 

[1] MEMS and Micro/Nano Systems Laboratory, Department of Physics, Indian Institute of Technology

关键词: anodisation;    silicon compounds;    thin films;    micromechanical devices;    thin film devices;    surface roughness;    surface morphology;    refractive index;    atomic force microscopy;    etching;    microfabrication;    Fourier transform spectra;    infrared spectra;    anodic silicon dioxide thin films;    microelectromechanical system application;    anodic oxidation;    oxide properties;    surface morphology;    surface roughness;    spectroscopic ellipsometry;    refractive index;    film thickness;    atomic force microscopy;    micromechanical structures;    etch rate;    tetramethylammonium hydroxide;    potassium hydroxide solutions;    MEMS components;    etchant;    temperature 293 K to 298 K;    SiO2;    Si;   

DOI  :  10.1049/mnl.2014.0360

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Objective: Cornelia de Lange syndrome (CdLS) is characterized by multiple anatomic malformations, which may affect airway and anesthetic management. The study’s objective was to collect information from families of CdLS patients regarding their perception of their airway and anesthesia experiences and associated complications. This would allow anesthesiologists to evaluate the families’ perspective in order to create a better approach to treating patients. Methodology: A web-based, 24 question survey was solicited via the CdLS Foundation’s quarterly newsletter (circulation 4,000) It was followed up, via phone, Skype, and e-mail, with questions targeting intubation, ventilation, oxygenation, aspiration, and complications during surgery and procedures requiring sedation. A paper version of the survey was distributed to families and caregivers of the patients at the 2014 CdLS Foundation National Family Conference. The focus of the survey was to obtain the families’/caregivers’ perception related to airway and anesthetic management experiences and perspectives regarding overall clinical care.

【 授权许可】

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